銆�銆�鍦ㄦ棩鍓嶄簬鑿簻鑸夎鐨勭編鍦�(gu贸)绉戝(xu茅)鑸囧伐绋嬬瘈(ji茅)(USA Science & Engineering Festival)涓紝IBM鑸囥�婂湅(gu贸)瀹跺湴鐞嗛洔蹇椼�嬪厭绔ョ増(National Geographic Kids)鍏卞悓灞曠ず浠BM寰瀷3D鎵撳嵃姗�(j墨)鎵撳嵃鍑鸿櫉(h脿o)绋辨槸涓栫晫涓婃渶灏忕殑闆滃織灏侀潰锛屽叾灏哄鍍�11×14寰背(灏忓埌鍙湪1椤嗛菇绮掍腑瀹圭磵2,000闋�(y猫))锛屽畬鎴愪竴闋�(y猫)灏侀潰鎵撳嵃鍙渶10鍒嗛悩銆�
銆�銆�IBM铇囬粠涓栫爺绌跺(sh铆)椹�(y脿n)瀹ら枊(k膩i)鐧�(f膩)鐨勯�欐寰瀷3D鎵撳嵃姗�(j墨)鑳藉鍦ㄨ粺鎬ц仛鍚堢墿瀵叆绱嶇背绱�(j铆)鍒嗚鲸鐜囩殑鍦栨锛岄毃鍚庡彲鍐嶈綁(zhu菐n)绉昏嚦纭呰姱鐗囥�両II-V鏃�(鐮峰寲閹碉紱GaAs)鎴栫煶澧ㄧ儻鍩哄簳涓娿�傜浉杓冧簬闆诲瓙鏉�(e-beam)寰奖锛岀暥(d膩ng)宸ョ▼甯稉(j墨ng)鐢遍’寰彙涓嬭鐪嬮�欑ó鍦栨鏅�(sh铆)锛岄倓鑳介��(j矛n)琛屽鍏ユ垨璁�鍙栦互瀵�(sh铆)鐝�(xi脿n)瀵�(sh铆)鏅�(sh铆)椹�(y脿n)璀夈��
銆�銆�“鐩歌純浜庨浕瀛愭潫锛屾渶澶х殑宸垾鍦ㄤ簬浣犲彲浠ヨ紩鏄撳湴瀵叆3D鍦栨锛岃�岄�欏皪(du矛)浜庨浕瀛愭潫鎶�琛�(sh霉)鑰岃█妤靛叿鎸戞埌(zh脿n)鎬с��”姝ゅ锛孖BMResearch鐨勭瀛�(xu茅)瀹禖olin Rawlings鎸囧嚭锛�“鍙︿竴闋�(xi脿ng)杓冨ぇ鐨勫樊鍒ユ槸瀹冪殑鎴愬儚鑳藉姏鈹�鈹�鎴戝�戜笉浣嗚兘璁�鍙栵紝涔熻兘瀵叆銆傚湪寤虹珛3D鍦栨鍚庯紝鎴戝�戝彲浣垮叾浣滅偤鍘熷瓙鍔涢’寰彙(AFM)锛屼互娆＄磵绫崇礆(j铆)鍒嗚鲸鐜囬��(j矛n)琛屾脯(c猫)閲忊攢鈹�閫欒畵鎴戝�戝緱浠ラ(y脿n)璀�3D鍦栨锛屽悓鏅�(sh铆)杓曟澗鍦版壘鍑鸿仛鍚堢墿灞や笅鏂圭殑绲�(ji茅)妲�(g貌u)銆�
銆�銆�铇囬粠涓栨柊鍓�(chu脿ng)鍏徃SwissLitho AG宸插彇寰椾簡閫欐寰瀷3D鎵撳嵃姗�(j墨)鐨勬巿娆�(qu谩n)锛屽苟灏囧叾绋辩偤NanoFrazor 鈹�鈹�鍙栬嚜鑻辨枃razor鑸囧痉鏂噈illing machine鐨勫京(f霉)鍚堝瓧銆係wissLitho灏囬�欐NanoFrazor鎵撻�犳垚鍍忔槸鍏锋湁绱嶇背绱�(j铆)鍒嗚鲸鐜囩殑閵戝簥锛屽畠鍦ㄨū澶氭柟闈㈢殑鎬ц兘閮借秴瓒婁簡闆诲瓙鏉燂紝涓斿叾鎴愭湰鏇翠綆锛岀磩50钀�(w脿n)缇庡厓鈹�鈹�闆诲瓙鏉熼�氬父寰楄姳璨�(f猫i)150钀�(w脿n)缇庡厓鑷�3,000钀�(w脿n)缇庡厓涔嬮枔銆�
銆�銆�“閫欐3D鎵撳嵃姗�(j墨)NanoFrazor閬╃敤浜庡悇绋噳(y墨ng)鐢ㄧ殑蹇�熷師鍨嬶紝”Rawlings琛ㄧず锛�“瀹冨彲瀵�(sh铆)鐝�(xi脿n)姣忕姣背绱�(j铆)鐨勬巸鎻忛�熷害锛屽苟閲囩敤涓�鍊�(g猫)瀹夎鍦ㄥ彲褰庢洸鎳歌噦鐨勫皥鐢ㄥ姞鐔辨帰闋紝瑭叉嚫鑷傞暦(zh菐ng)700nm锛岃�屽姞鐔辨帰闋崐寰戝儏10nm銆�”
銆�銆�IBM鐨�3D鎵撳嵃姗�(j墨)閲囩敤鍍忓師瀛愬姏椤井閺¤埇鐨勬搷浣滄柟寮忥紝浣嗗付鏈変竴鍊�(g猫)鍙敤浜庨洉濉�3D绱嶇背绱�(j铆)鍒嗚鲸鐜囧湒妗堢殑鍔犵啽鎺㈤牠銆傦紙渚�(l谩i)婧愶細IBM锛�
銆�銆�鐣�(d膩ng)璁�鍙栧湒妗堢殑娓�(c猫)閲忔繁搴﹂仈(d谩)娆＄磵绫崇礆(j铆)绮剧⒑搴︽檪(sh铆)锛岀窔瀵簿纰哄害鐐�10nm锛岃��3D娣卞害绮剧⒑搴︾偤1nm銆侷BM鏈熸湜鑳介�忛亷(gu貌)寰奖杞�(zhu菐n)绉绘妧琛�(sh霉)锛屽湪2014骞村勾搴曚互鍓嶅湪III-V鏃忓拰鐭冲ⅷ鐑潗鏂欎腑瀵�(sh铆)鐝�(xi脿n)鍘熷瀷绌块毀鍫�(ch菐ng)鏁堟噳(y墨ng)鏅堕珨绠�(FET)銆�
銆�銆�“鎴戝�戝厛娌堢⿳鑱氬悎鐗╁堡锛岀劧鍚庣鏅舵垨III-V鏃忔潗鏂欏堡锛岀劧鍚庡啀娌堢⿳鍙︿竴鍊�(g猫)鑱氬悎鐗╁堡锛�”Rawlings琛ㄧず锛�“鍦ㄥ鍏ュ悗鍒囨彌鍒版暣鍊�(g猫)鑱氬悎鐗╁潎鍕昏畩钖勭殑绯荤当(t菕ng)涓紝鍦ㄥ湒妗堝舰鎴愯檿鐢�(ch菐n)鐢熷瓟娲炪�傜劧鍚庡啀鐢ㄦ(bi膩o)婧�(zh菙n)鎶�琛�(sh霉)铦曞埢绌块�忚仛鍚堢墿鑷冲熀搴曚笅鏂癸紝褰㈡垚涓�鍊�(g猫)鍙稉(j墨ng)鐢卞湒妗堝瓟娲炴矆绌嶆潗鏂欑殑鍏夌僵銆�”
銆�銆�3D鎵撳嵃姗�(j墨)鐨勫姞鐔辨(j墨)鍒堕暦(zh菐ng)700nm锛屼絾鎺㈤牠鍗婂緫鍍�10nm锛屽彲瀵�(sh铆)鐝�(xi脿n)绱嶇背绱�(j铆)鍒嗚鲸鐜囥�傦紙渚�(l谩i)婧愶細IBM锛�
銆�銆�IBM骞跺槜瑭﹀皣瑭�3D鎵撳嵃鎶�琛�(sh霉)鐢ㄤ簬閲忓瓙閬�(y霉n)绠楁噳(y墨ng)鐢ㄤ腑锛屼互鍌崇当(t菕ng)寰奖鎶�琛�(sh霉)鐒�(w煤)娉曞(sh铆)鐝�(xi脿n)鐨勬柟寮忓埗浣滃嚭鍙湪鑺墖涓婃帶鍒惰垏鎿嶇副鍏夌殑鍦栨銆侷BM琛ㄧず锛岀敤浜庡(sh铆)鐝�(xi脿n)閲忓瓙鍘熷瀷鐨勭郴绲�(t菕ng)鐗硅壊涔嬩竴鍦ㄤ簬鍙舰鎴�3D鍦栨鐐鸿钀藉皫(d菐o)鍏夛紝寰炶�屾笡灏戝皫(d菐o)鍏夋檪(sh铆)鐨勫厜鏁ｅ皠鍟�(w猫n)椤屻��
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